CELLO Ohmiker - 80BM 半导体镀膜系统用途：专为半导体后 / 前侧金属化镀膜工艺设计，适用于处理尺寸达 6 英寸的晶圆，能满足高通量、长期可靠运行的生产需求 。性能：采用全手动操作模式。配备真空抽气系统，可营造镀膜所需真空环境。电源要求为 AC 380V、3 相、60Hz、80A。需要接地的干燥空气，且其电阻小于 3Ω，铜板厚度大于 5mm 。

Product Name: CELLO Ohmiker - 80BM Semiconductor Coating SystemPurpose: Specifically designed for the semiconductor backside/frontside metalization coating process, it is suitable for processing wafers up to 6 inches in size, meeting the production requirements of high throughput and long - term reliable operation.Performance: It adopts a full - manual operation mode. It is equipped with a vacuum pumping system to create a vacuum environment required for coating. The power supply requirements are AC 380V, 3 - phase, 60Hz, 80A. It requires grounded dry air with an electrical resistance less than 3Ω and a copper board thickness greater than 5mm.