巴尔查斯 BALZERS BAK 640 真空镀膜设备用途：常用于光学领域，可在镜片、滤光片等光学元件上镀制增透、反射、分光等功能性薄膜。也适用于科研机构，进行材料薄膜沉积研究，如制备半导体薄膜、金属氧化物薄膜等 。性能：配备 7kW 的 ESQ 110 电子束蒸发器，在蒸发前系统压力可降至2×10−3Pa ，随后通过自动阀门引入氧气。可在玻璃基板上进行反应电子束蒸发沉积薄膜。当基板温度为 25°C 时，不同起始材料制得的二氧化钛薄膜的折射率在 2.06 - 2.22 间变化，应力和耐磨性也因材料而异；基板加热至 250°C 时，薄膜折射率约为 2.4，且均呈现高拉应力和良好耐磨性 。

Product Name: BALZERS BAK 640 Vacuum Coating EquipmentPurpose: It is often used in the optical field and can coat functional films such as anti - reflection, reflection, and beam - splitting films on optical components such as lenses and optical filters. It is also suitable for research institutions to conduct material thin - film deposition research, such as preparing semiconductor thin films and metal oxide thin films.Performance: It is equipped with a 7kW ESQ 110 electron beam evaporator. Before evaporation, the system pressure can be reduced to 2×10−3Pa, and then oxygen is introduced through an automatic valve. It can deposit thin films by reactive electron beam evaporation on glass substrates. When the substrate temperature is 25°C, the refractive index of titanium dioxide films prepared from different starting materials varies between 2.06 - 2.22, and the stress and wear resistance also vary depending on the materials. When the substrate is heated to 250°C, the refractive index of the films is approximately 2.4, and all films exhibit high tensile stress and good wear resistance.