维易科 VEECO Spector用途:用于光学镀膜,适用于精密光学、激光、生命科学、生物医学设备以及通信等领域,能实现高精度光学薄膜的一站式制造。性能:具备出色的薄膜质量控制能力,可提供高产能。例如部分型号相比前一代产能提升显著,靶材使用率大幅提高,材料生长均匀性更佳。拥有多种配置选项,如不同的夹具、靶组件以及先进的光学监测系统,可满足各类光学薄膜制造应用对产量和器件性能的要求。一些型号能在较大尺寸的基片(如直径达 400mm、厚度 100mm)上实现优异的材料均匀性,高电流射频离子源可提供出色的沉积速率。
Product Name: VEECO SpectorPurpose: It is used for optical coating and is applicable to fields such as precision optics, lasers, life sciences, biomedical devices, and communications, enabling one - stop manufacturing of high - precision optical thin films.Performance: It has excellent thin - film quality control capabilities and can provide high productivity. For example, some models have a significant increase in productivity compared to the previous generation, with a substantial improvement in target utilization rate and better material growth uniformity. It has a variety of configuration options, such as different fixtures, target assemblies, and advanced optical monitoring systems, which can meet the yield and device performance requirements of various optical thin - film manufacturing applications. Some models can achieve excellent material uniformity on large - sized substrates (such as 400 mm in diameter and 100 mm in thickness), and high - current RF ion sources can provide excellent deposition rates.