爱发科 ULVAC SH - 550 - C12用途:这是一款在半导体、光学、平板显示等行业应用的设备,可用于薄膜的溅射沉积工作。在半导体芯片制造中,助力金属电极、绝缘层等薄膜的制备;在光学领域,可实现光学镜片增透膜、反射膜等的制作;在平板显示行业,能为透明导电膜等关键薄膜的生产提供支持 。性能:虽然缺乏公开的具体参数,但依据爱发科在相关领域的技术实力推断,该设备具备高效的真空抽气系统,能够快速营造出适合薄膜溅射的高真空环境,确保薄膜沉积质量。其溅射源稳定性强,可精准调控溅射速率,保证薄膜厚度均匀,将厚度偏差控制在极小范围。此外,设备可能配备自动化的晶圆传送系统,以此提升生产效率,实现高效的连续生产 。
Product Name: ULVAC SH - 550 - C12Purpose: This is a device used in industries such as semiconductors, optics, and flat panel displays, and can be used for thin - film sputter deposition. In semiconductor chip manufacturing, it helps in the preparation of thin films such as metal electrodes and insulating layers. In the optical field, it can be used to produce anti - reflection coatings, reflective coatings, etc. for optical lenses. In the flat panel display industry, it can support the production of key thin films such as transparent conductive films.Performance: Although specific public parameters are lacking, based on ULVAC's technical strength in related fields, this device is inferred to have an efficient vacuum pumping system that can quickly create a high - vacuum environment suitable for thin - film sputtering, ensuring the quality of thin - film deposition. Its sputtering source has strong stability and can precisely control the sputtering rate, ensuring uniform film thickness and keeping the thickness deviation within a minimal range. In addition, the device may be equipped with an automated wafer transfer system to improve production efficiency and achieve efficient continuous production.