DENTON VACUUM Desk II XLS 溅射镀膜系统用途:适用于科研和工业领域,能在多种材料及基底表面沉积功能性薄膜,如在半导体行业用于样品镀膜,在光学领域制备功能薄膜,还可用于电路板组装、先进光电子应用等场景。性能:采用磁控溅射头,搭配 6 英寸直径的 Pyrex 腔室。支持射频(RF)或直流(DC)电源,可灵活选择溅射材料。具备可旋转、倾斜的样品台,确保不规则样品表面也能实现均匀镀膜。拥有薄膜厚度监测仪,可精确控制镀膜厚度。具备溅射和蚀刻模式,操作模式有自动或手动可选。设备配备的真空系统能营造高真空环境,有助于提升镀膜质量 。
Product Name: DENTON VACUUM Desk II XLS Sputter Coating SystemPurpose: It is suitable for scientific research and industrial fields. It can deposit functional thin films on the surfaces of various materials and substrates. For example, it is used for sample coating in the semiconductor industry, preparing functional films in the optical field, and can also be applied in scenarios such as circuit board assembly and advanced optoelectronic applications.Performance: It adopts a magnetron sputter head and is equipped with a 6 - inch - diameter Pyrex chamber. It supports radio - frequency (RF) or direct - current (DC) power supplies, allowing for flexible selection of sputtering materials. It has a rotatable and tiltable sample stage to ensure uniform coating even on the surfaces of irregular samples. It is equipped with a film thickness monitor to accurately control the coating thickness. It has sputtering and etching modes, and the operation mode can be selected as automatic or manual. The vacuum system equipped in the device can create a high - vacuum environment, which helps to improve the coating quality.