马尔文 PANALYTICAL PW 2830用途：专为半导体和数据存储行业打造，用于测量薄膜厚度与成分，能对最大 300mm 的各类晶圆，测定其分层成分、厚度、掺杂程度和表面均匀性。技术原理：属于波长色散 X 射线荧光（WDXRF）分析仪。通过发射 X 射线激发样品，不同元素受激发产生特定波长的特征 X 射线荧光，利用晶体分光器将不同波长的荧光 X 射线分开，探测器接收并转化为电信号，以此分析元素种类和含量。性能：配备 4kW SST - max X 射线管，采用突破性 Zeta 技术，消除 X 射线管老化影响，保障 “新管” 性能贯穿始终；最高 160mA 电流运作，提供高灵敏度和低检测限；针对硼到镁等轻元素设有专属高效能测量通道；搭配先进的 SuperQ 软件，含 FP Multi 多层分析软件包，可对多达 16 层薄膜的厚度和成分同时分析，最多能同时测量 24 个元素 。

Product Name: Malvern PANalytical PW 2830Purpose: Specifically designed for the semiconductor and data storage industries, it is used to measure film thickness and composition. It can determine the layer composition, thickness, dopant levels and surface uniformity of various wafers up to 300mm.Technical Principle: It belongs to the wavelength dispersive X - ray fluorescence (WDXRF) analyzer. By emitting X - rays to excite the sample, different elements generate characteristic X - ray fluorescence of specific wavelengths when excited. A crystal spectrometer is used to separate the fluorescent X - rays of different wavelengths, and the detector receives and converts them into electrical signals to analyze the types and contents of elements.Performance: Equipped with a 4kW SST - max X - ray tube, it adopts the groundbreaking Zeta technology to eliminate the influence of X - ray tube aging and ensure the "new tube" performance throughout. It operates at a maximum current of 160mA, providing high sensitivity and low detection limits. There are dedicated high - performance measurement channels for light elements from boron to magnesium. It is equipped with the advanced SuperQ software, including the FP Multi multi - layer analysis software package, which can simultaneously analyze the thickness and composition of up to 16 layers of films and can measure up to 24 elements simultaneously.