菲尼克斯 PHOENIX Micromex 180用途：为 X 射线微区分析设备，适用于半导体、材料科学、地质勘探等领域，用于微小区域的元素成分分析与分布检测，助力微观结构研究与质量评估。技术原理：基于电子束激发 X 射线荧光技术，聚焦电子束轰击样品微区，使元素释放特征 X 射线，探测器采集其能量与强度信号，分析确定元素种类及含量。性能：空间分辨率达 0.5μm；加速电压 5-30kV 可调；束流范围 1pA-1μA；检测元素覆盖硼（B）至铀（U）；配备高分辨率探测器，分析效率高，数据重复性好。

Product Name: PHOENIX Micromex 180Purpose: It is an X-ray microanalysis device, suitable for semiconductor, materials science, geological exploration and other fields. It is used for elemental composition analysis and distribution detection in small areas, aiding microstructure research and quality evaluation.Technical Principle: Based on electron beam excited X-ray fluorescence technology, the focused electron beam bombards the sample's micro-area, making elements release characteristic X-rays. The detector collects their energy and intensity signals, and analyzes to determine element types and contents.Performance: Spatial resolution up to 0.5μm; acceleration voltage adjustable from 5-30kV; beam current range 1pA-1μA; detectable elements covering boron (B) to uranium (U); equipped with high-resolution detector, with high analysis efficiency and good data repeatability.