贝克休斯 WAYGATE TECHNOS TREX 610T用途：用于材料分析与半导体工艺检测，可对晶圆制造、光电器件及纳米材料等进行薄膜成分、厚度及光学特性分析，适用于 2-12 英寸晶圆、玻璃基板、柔性衬底等工件检测，最大可支持 300mm×300mm 面积扫描。技术原理：基于紫外 - 可见 - 近红外（UV-Vis-NIR）光谱反射 / 透射法，波长范围覆盖 190nm - 1100nm，搭配椭圆偏振模块，能精准分析透明 / 半透明薄膜相关特性。性能：厚度测量范围 1nm - 10μm，精度 ±0.5%；可测折射率（n）、消光系数（k）、成分占比及光学带隙；单点光谱采集时间＜0.5 秒，波长分辨率达 1nm；通过光谱曲线拟合算法反演多层膜结构参数，内置超 500 种材料光学常数数据库 。

Product Name: Baker Hughes WAYGATE TECHNOS TREX 610TPurpose: It is used for material analysis and semiconductor process inspection. It can analyze the film composition, thickness and optical properties of wafer manufacturing, optoelectronic devices, nanomaterials, etc. It is suitable for the inspection of workpieces such as 2 - 12 inch wafers, glass substrates and flexible substrates, and can support scanning of an area up to 300mm×300mm.Technical Principle: Based on the ultraviolet - visible - near - infrared (UV - Vis - NIR) spectral reflection/transmission method, the wavelength range covers 190nm - 1100nm. With an ellipsometry module, it can accurately analyze the relevant properties of transparent/semitransparent films.Performance: The thickness measurement range is 1nm - 10μm with an accuracy of ±0.5%. It can measure the refractive index (n), extinction coefficient (k), composition ratio and optical bandgap. The single - point spectral acquisition time is less than 0.5 seconds, and the wavelength resolution reaches 1nm. The multi - layer film structure parameters can be inverted through the spectral curve fitting algorithm, and there is an internal database of optical constants of more than 500 materials.