应用材料腔室交流配电箱 AXIOM 300 毫米（APPLIED MATERIALS CHAMBER AC DISTRIBUTION BOX AXIOM 300MM）用途：为 300 毫米晶圆制造设备的腔室系统提供稳定、精准的交流电源分配与管理，保障刻蚀、沉积等制程设备的电力供应。技术原理：采用模块化配电架构，集成过载保护、电压调节及电流监控功能，通过智能电路设计实现电源的高效分配与安全防护。性能：输入电压范围 380-480V AC，输出电流可达 60A；响应时间＜5ms，供电稳定性 ±0.5%；具备多通道独立控制，支持热插拔，MTBF（平均无故障时间）≥10,000 小时。

Product Name: APPLIED MATERIALS CHAMBER AC DISTRIBUTION BOX AXIOM 300MMPurpose: Provides stable and precise AC power distribution and management for chamber systems of 300mm wafer manufacturing equipment, ensuring power supply for etching, deposition and other process equipment.Technical Principle: Adopts modular power distribution architecture, integrates overload protection, voltage regulation and current monitoring functions, and realizes efficient power distribution and safety protection through intelligent circuit design.Performance: Input voltage range 380-480V AC, output current up to 60A; Response time < 5ms, power supply stability ±0.5%; Equipped with multi-channel independent control, supports hot swapping, MTBF (Mean Time Between Failures) ≥10,000 hours.