应用材料 300 毫米 ASP 刻蚀腔室交流配电箱（APPLIED MATERIALS 300mm ASP ETCH CHAMBER AC DIST.BOX）用途：为 300 毫米 ASP 刻蚀腔室系统提供精准交流电源分配，保障刻蚀制程中的电力供给稳定，适配 ASP 系列刻蚀设备的电力需求。技术原理：采用专用电路拓扑结构，集成电源过滤与负载均衡模块，通过实时监控电路实现过载保护与电压稳定调节。性能：输入电压 380-480V AC，额定功率 15kVA；输出通道 8 路，单路最大电流 30A；电压波动≤±0.3%，响应时间＜8ms；工作湿度 10-90% RH，MTBF≥12,000 小时。

Product Name: APPLIED MATERIALS 300mm ASP ETCH CHAMBER AC DIST.BOXPurpose: Provides precise AC power distribution for 300mm ASP etch chamber systems, ensures stable power supply during etching processes, and adapts to the power requirements of ASP series etching equipment.Technical Principle: Adopts dedicated circuit topology, integrates power filtering and load balancing modules, and realizes overload protection and voltage stability adjustment through real-time monitoring circuits.Performance: Input voltage 380-480V AC, rated power 15kVA; 8 output channels, maximum current of single channel 30A; Voltage fluctuation ≤±0.3%, response time <8ms; Operating humidity 10-90%RH, MTBF ≥12,000 hours.