日立 HITACHI DM-471P-S 扫描电子显微镜。

用途：主要用于 SEM 扫描电子显微镜微观形貌分析以及 EDX 能谱仪元素成份分析。

技术原理：采用冷场发射电子枪，发射源亮度高、像散小；配置半内透镜物镜，在大工作距离观察等信号产额少时可获得更多信号；配备多种探测器，可全面获取样品真实形貌；结合能谱仪，实现微区成分及分布差异测试。

性能：二次电子分辨率为 0.6nm@15kV，0.7nm@1kV；加速电压最小着陆电压 0.01kV，最大加速电压 30kV；电子束流 1pA-20nA 连续可变；样品台 X、Y 轴行程 110mm，Z 轴行程 1.5-40mm，T 轴行程 - 5°～+70°，R 轴可 360 度连续旋转；分析型 SDD 硅漂移电制冷探测器，晶体面积 80mm²，有效面积 65mm²，重元素能量分辨率 Mn Ka 保证优于 127eV（@计数率 130,000cps）等。

Product Name：Hitachi HITACHI DM - 471P - S Scanning Electron Microscope.

Purpose：It is mainly used for SEM scanning electron microscope micro - morphology analysis and EDX energy - dispersive spectrometer element composition analysis.

Technical Principle：It adopts a cold - field emission electron gun with high - brightness emission source and small astigmatism; is equipped with a semi - in - lens objective lens to obtain more signals when the signal yield is low, such as during large - working - distance observation; is equipped with a variety of detectors to comprehensively obtain the true morphology of the sample; and combines an energy - dispersive spectrometer to realize the test of micro - area composition and distribution differences.

Performance：The secondary electron resolution is 0.6nm@15kV, 0.7nm@1kV; the acceleration voltage has a minimum landing voltage of 0.01kV and a maximum acceleration voltage of 30kV; the electron beam current is continuously variable from 1pA to 20nA; the sample stage has an X - axis and Y - axis travel of 110mm, a Z - axis travel of 1.5 - 40mm, a T - axis travel of - 5°～+70°, and the R - axis can rotate 360 degrees continuously; the analytical SDD silicon drift electric refrigeration detector has a crystal area of 80mm², an effective area of 65mm², and the heavy - element energy resolution of Mn Ka is guaranteed to be better than 127eV (@count rate 130,000cps), etc.