鲁道夫 RUDOLPH MetaPulse 300XCu 不透明薄膜计量工具。
用途：用于 300mm 产品晶圆，可同时测量多层金属薄膜堆叠中五层及以上各层的单独厚度。能早期检测出缺失层、因附着力差和层间反应导致的问题，还可测定表面及掩埋层的均方根粗糙度，为产品薄膜堆叠提供关键信息。
技术原理：采用皮秒超声激光声纳技术，这是一种基于激光诱导超声的非接触、无损测量技术。将声波脉冲导向金属薄膜，脉冲穿过金属薄膜到达金属薄膜与绝缘层的界面，部分声波脉冲从界面反射，从金属薄膜表面发射后被声波探测器侦测到，通过测量声波脉冲从照射到被侦测到的时间，转换成金属薄膜厚度。
性能：具备高通量，可进行全自动厚度测量，精度达埃（angstrom）级，重复性达亚埃级。拥有强大的模式识别系统，能将 10µm 的测量点准确放置在现有计量位点，以实现可靠测量。超快激光输出（钛蓝宝石）为 800nm、300mW，脉冲宽度 100×10⁻¹⁵秒；二极管泵浦激光功率 2W 。电源要求为 220V AC（4900 VA），单相，频率 50/60Hz 。
Product Name：RUDOLPH MetaPulse 300XCu Opaque Film Metrology Tool.
Purpose：It is used for 300 - mm product wafers and can simultaneously measure the individual thicknesses of five or more layers in a multi - layer metal film stack. It can detect missing layers, problems due to poor adhesion and interlayer - reaction at an early stage, and can determine the root - mean - square roughness of surface and buried layers, providing critical information about the product's film stack.
Technical Principle：It adopts picosecond ultrasonic laser sonar technology, a non - contact and non - destructive measurement technique based on laser - induced ultrasound. The acoustic pulse is directed to the metal film. The pulse passes through the metal film to the interface between the metal film and the insulating layer. Part of the acoustic pulse is reflected from the interface and emitted from the surface of the metal film to be detected by the acoustic detector. The time from the irradiation of the acoustic pulse to its detection is converted into the thickness of the metal film.
Performance：It has high throughput and can perform fully - automated thickness measurements with angstrom accuracy and sub - angstrom repeatability. It has a robust pattern recognition system that can accurately place its 10 - µm measurement spot within existing metrology sites for reliable measurements. The ultrafast laser output (Ti - sapphire) is 800 nm, 300 mW, with a pulse width of 100×10⁻¹⁵ s; the diode - pumped laser power is 2 W. The power requirement is 220V AC (4900 VA), single - phase, with a frequency of 50/60Hz.