川崎 KAWASAKI 3NT620C - A003 无尘室晶圆搬运机器人。

用途：专为无尘室环境设计，主要应用于半导体、有机 EL、LCD 面板、太阳能面板等制造领域，用于 300mm 或 450mm 晶圆的高效搬运。

技术原理：通过电机驱动关节实现多自由度运动，软件和硬件配备碰撞检测功能。能适应无尘室严苛环境，符合相关行业标准。

性能：可伸展管护多达四个 FOUP。标准性能为带校准器时每小时搬运 280 片晶圆（WPH），不带校准器时达 400WPH ，选配特定抓手吞吐量可提升至 700WPH。满足 SEMI F47 电压骤降免责标准及 SEMI S2 环境、健康与安全标准。

Product Name：Kawasaki KAWASAKI 3NT620C - A003 Cleanroom Wafer Handling Robot.

Purpose：Specifically designed for cleanroom environments, mainly applied in manufacturing fields such as semiconductors, organic EL, LCD panels, and solar panels, for the efficient handling of 300mm or 450mm wafers.

Technical Principle：It realizes multi - degree - of - freedom movement through motor - driven joints. Both software and hardware are equipped with collision detection functions. It can adapt to the harsh environment of cleanrooms and comply with relevant industry standards.

Performance：It can extend to manage up to four FOUPs. The standard performance is 280 wafers per hour (WPH) with an aligner and 400 WPH without an aligner. The throughput can be increased to 700 WPH with an optional gripper. It meets the SEMI F47 voltage sag exoneration standard and the SEMI S2 environmental, health and safety standards.