川崎 KAWASAKI 3NT420B - B029 无尘机器人。

用途：主要应用于半导体、有机 EL、LCD 面板、太阳能面板等制造领域，用于 300mm 或 450mm 晶圆的搬运工作。

技术原理：采用下一代设计，无需使用线性轴，一个机器人可伸展开来管护多达四个 FOUP，通过电机驱动关节实现多自由度运动，从而完成晶圆的搬运操作。

性能：在不使用校准器的情况下，可达到每小时 400 片晶圆（WPH）的搬运速率。

Product Name：Kawasaki KAWASAKI 3NT420B - B029 Cleanroom Robot.

Purpose：It is mainly applied in the manufacturing fields of semiconductors, organic EL, LCD panels, solar panels, etc., and is used for the handling of 300mm or 450mm wafers.

Technical Principle：Adopting the next - generation design, it does not require the use of linear axes. One robot can be extended to manage up to four FOUPs, and realizes multi - degree - of - freedom movement through motor - driven joints, so as to complete the handling operation of wafers.

Performance：Without using an aligner, it can reach a handling rate of 400 wafers per hour (WPH).