川崎KAWASAKI 3NT420B - B005无尘室机器人。

用途：主要用于半导体、有机EL、LCD面板、太阳能面板等制造领域，承担300mm或450mm晶圆的搬运工作。

技术原理：采用先进设计，无需线性轴，单个机器人可伸展管护多达四个晶圆盒（FOUP）。依靠电机驱动关节，实现多自由度运动，完成精准的晶圆搬运动作，软件和硬件均配备碰撞检测功能。

性能：在不使用校准器的情况下，搬运速率可达每小时400片晶圆（WPH），符合SEMI F47电压骤降免责标准及SEMI S2环境、健康与安全标准 。

Product Name：Kawasaki KAWASAKI 3NT420B - B005 Cleanroom Robot.

Purpose：Mainly used in manufacturing fields such as semiconductors, organic EL, LCD panels, and solar panels for handling 300mm or 450mm wafers.

Technical Principle：Adopts an advanced design without linear axes. A single robot can be extended to manage up to four wafer cassettes (FOUPs). It relies on motor - driven joints to achieve multi - degree - of - freedom movement for precise wafer handling. Both software and hardware are equipped with collision detection functions.

Performance：Without using an aligner, the handling rate can reach 400 wafers per hour (WPH). It complies with the SEMI F47 voltage sag exoneration standard and the SEMI S2 environmental, health and safety standards.