川崎 KAWASAKI 3NT420B - B003 无尘室机器人。

用途：常用于半导体、有机 EL、LCD 面板及太阳能面板等制造领域，主要负责 300mm 或 450mm 晶圆的搬运工作。

技术原理：采用先进设计理念，无需线性轴。单个机器人可伸展开来管护多达四个晶圆盒（FOUP）。借助电机驱动关节，实现多自由度精准运动，以此完成晶圆搬运操作，同时软硬件均配备碰撞检测功能，保障运行安全。

性能：在不使用校准器的情况下，搬运速率可达每小时 400 片晶圆（WPH） ，满足 SEMI F47 电压骤降免责标准以及 SEMI S2 环境、健康与安全标准。

Product Name：Kawasaki KAWASAKI 3NT420B - B003 Cleanroom Robot.

Purpose：It is often used in manufacturing fields such as semiconductors, organic EL, LCD panels and solar panels, mainly responsible for the handling of 300mm or 450mm wafers.

Technical Principle：It adopts an advanced design concept without linear axes. A single robot can be extended to manage up to four wafer cassettes (FOUPs). It uses motor - driven joints to achieve multi - degree - of - freedom precise movement, thus completing the wafer handling operation. Meanwhile, both software and hardware are equipped with collision detection functions to ensure operational safety.

Performance：Without using an aligner, the handling rate can reach 400 wafers per hour (WPH). It meets the SEMI F47 voltage sag exoneration standard and the SEMI S2 environmental, health and safety standards.