艾斯特 ASYST IsoPort 300mm 负载端口。

用途：为半导体工具原始设备制造商（OEM）提供高度可配置的自动化晶圆处理解决方案，以便与他们的工具集成。

技术原理：通过精确的伺服控制运动、智能锁键设计和优化的载体感应，实现高度的互操作性。采用先进的设计，确保符合严格的行业规范。

性能：从载体到达至首次访问晶圆的时间仅为 8 秒，大大提高了工具吞吐量。污染控制性能达到 ISO 1 级颗粒水平，在层流路径中打开时，可消除载体门上的摩擦电荷积累。此外，还设有可选的气体吹扫端口，为晶圆提供惰性环境。

Product Name：Asyst IsoPort 300mm Load Port.

Purpose：It provides semiconductor tool original equipment manufacturers (OEMs) with a highly configurable automated wafer - handling solution for integration with their tools.

Technical Principle：It achieves a high degree of interoperability through precise servo - controlled motion, smart latchkey design and optimized carrier sensing. It adopts an advanced design to ensure compliance with strict industry specifications.

Performance：The time from carrier arrival to first - wafer access is only 8 seconds, which greatly improves the tool throughput. The contamination control performance reaches the ISO class 1 particle level, eliminating triboelectric charge buildup on the carrier door in the laminar flow path when open. In addition, optional gas purge ports are provided to provide an inert environment for wafers.